Preparation of RF sputtered AZO/Au thin film hydrogen peroxide sensitive electrode for utilization as a biosensor

Abstract

In this study, hydrogen peroxide (H2O2) sensitive Al doped ZO(AZO)/Au thin film electrode has been developed for the utilization as a biosensor. A preferred c-axis oriented AZO/Au thin film was deposited on quartz substrate by RF magnetron sputtering at room temperature. Structural, morphological and optical properties of the AZO film were analyzed by X-ray diffraction, atomic force microscopy and photoluminescence. The sensor performance was characterized by electrochemical analysis device. The sensibility of prepared thin film electrodes to H2O2 was studied. The dependence of amperometric response current on the glucose and cholesterol concentrations was also investigated.