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dc.contributor.authorSARCAN, Fahrettin
dc.date.accessioned2021-03-02T16:34:14Z
dc.date.available2021-03-02T16:34:14Z
dc.date.issued2020
dc.identifier.citationSARCAN F., "ZnO nanoparticles-based vacuum pressure sensor", NANOTECHNOLOGY, cilt.31, sa.43, 2020
dc.identifier.issn0957-4484
dc.identifier.otherav_278a4b3b-ca8a-489a-ae5e-3becb8969c0a
dc.identifier.othervv_1032021
dc.identifier.urihttp://hdl.handle.net/20.500.12627/3197
dc.identifier.urihttps://doi.org/10.1088/1361-6528/aba39d
dc.description.abstractZnO nanoparticles synthesized using the sol-gel technique with an average diameter of 11.5 nm are used to fabricate a vacuum pressure sensor in the range of 1 mbar to 10(+3) mbar (low vacuum limit). A drastic increase in the current of the drop-casted ZnO on glass with 30 mu m separated Au contacts defined by e-beam lithography is observed. The sensor reveals a linear relationship in current versus pressure in a logarithmic plot. In the range of 1 mbar to 10(+3) mbar, the sensor sensitivity is found be 110. Using the resistance-time plot of the vacuum pressure, the rise (response) and fall (recovery) times of the sensor are determined as 6.6 and 15.6 s, respectively. The power consumption of the sensor is 6.5 mu W. The operational parameters of the proposed sensor are found be much better than those of previously reported ZnO nanostructure-based sensors and, indeed, traditional ones. The sensing mechanism of the sensor is explained by the adsorption/desorption of OH(-)ions from the surface of the ZnO nanoparticles, leaving behind oxygen ions combined with oxygen vacancy states.
dc.language.isoeng
dc.subjectYüzeyler ve arayüzeyler; İnce filmler ve nanosistemler
dc.subjectTemel Bilimler
dc.subjectMühendislik ve Teknoloji
dc.subjectFİZİK, UYGULAMALI
dc.subjectYoğun Madde 1:Yapısal, Mekanik ve Termal Özellikler
dc.subjectMühendislik, Bilişim ve Teknoloji (ENG)
dc.subjectMalzeme Bilimi
dc.subjectMALZEME BİLİMİ, MULTIDISCIPLINARY
dc.subjectTemel Bilimler (SCI)
dc.subjectFizik
dc.subjectNANOBİLİM VE NANOTEKNOLOJİ
dc.titleZnO nanoparticles-based vacuum pressure sensor
dc.typeMakale
dc.relation.journalNANOTECHNOLOGY
dc.contributor.departmentİstanbul Üniversitesi , Fen Fakültesi , Fizik Bölümü
dc.identifier.volume31
dc.identifier.issue43
dc.contributor.firstauthorID2215481


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